Advantages of peristaltic pump in chemical mechanical polishing

With the continuous improvement of technology, peristaltic pumps have begun to shift from laboratory applications to chemical process control and production fields. The significant advantage of peristaltic pumps is that the pump tube is used as a pump chamber. The fluid flows only through the pump pipe without contaminating the pump body, and the pump body does not contaminate the fluid. When cleaning, just replace the pump line. This eliminates costly disassembly time and maintenance time.

Chemical mechanical polishing refers to the process of using the polishing machine, polishing fluid, polishing cloth, etc. to achieve high flatness of material surface under certain technological conditions, and the supply of polishing fluid is completed by a peristaltic pump.

Peristaltic pump unique pumping liquid and pump body strictly separated structure and pump tube and pump head can be replaced at any time so that in the chemical polishing process, the advantages of peristaltic pump application is very obvious:

(1) Simple operation: CR peristaltic pump operation is very simple, pump pipeline installation, disassembly, locking can be required at any time according to the need, simple control, speed control can be achieved by speed control knob or operation panel. In addition, according to different flow requirements, the pump head can also be connected in series to achieve a multi-channel supply of polishing fluid.

(2) No pollution: in the process of chemical polishing, the polishing fluid conveyed by the peristaltic pump always flows in the pump tube, and does not contact the pump body, especially the mechanical transmission mechanism, avoiding metal pollution in the process of chemical mechanical polishing, and will not damage the mechanical components of the pump body due to the corrosive effect of the polishing fluid.

(3) In the process of chemical polishing, the polishing fluid delivered by the CR peristaltic pump always flows in the pump tube without contacting the pump body, especially the mechanical transmission mechanism, avoiding metal pollution in the process of chemical mechanical polishing, and avoiding damage to the mechanical parts of the pump body due to the corrosive nature of the polishing fluid.

Control of peristaltic pump

With the development of high density, fine, and multi-layer semiconductor devices, the chemical mechanical polishing process has become an essential process step, to meet the production needs of automatic processing, polishing fluid supply from the early manual supply, quantitative supply to automatic supply and flow automatic adjustment direction development. Peristaltic pump control can be manually adjusted through the operation panel, to control the pump speed (flow), direction, and start/stop operations, some can also set pumping time and pumping interval. To meet the requirements of automatic control of polishing fluid in the chemical mechanical polishing process, the peristaltic pump can also implement RS485 control or analog control through the upper computer.