Peristaltic pump plays a role in the polishing process

Chemical mechanical polishing refers to the use of a polishing machine, polishing fluid, polishing cloth, and other processes under certain conditions to achieve high surface flatness of the processing process, in which the supply of polishing fluid by the peristaltic pump to complete.

Polishing fluid is a kind of water-soluble polishing agent without any sulfur, phosphorus, and chlorine additives. The polishing fluid has good degreasing,  rust prevention, cleaning, and polishing properties, and can make metal products show real metallic luster. Stable performance, non-toxic, no pollution to the environment, and so on.

Type of polishing liquid: Polishing agent for silicon material / Sapphire polishing fluid / Gallium arsenide polishing solution / Lithium niobate polishing solution / Germanium polishing solution / Integrated circuit multiple copper wiring polishing fluid / Integrated circuit barrier polishing fluid

During the working process, the peristaltic pump can generate enough vacuum suction to suck the polishing liquid from the liquid pool into the pump tube, thereby eliminating the filling process of the previous irrigation pump and the suction tube. This also eliminates the need to flood the water, so it is no longer necessary to be placed below the liquid source level, making the pump's mounting position more flexible and better integrated with the polishing machine itself. In addition, the peristaltic pump will not lose water, which can save unnecessary waste.

Most of the polishing fluid can be transferred by our CR peristaltic pump.  

The peculiar structure of the peristaltic pump, which separates the pumping fluid from the pump body strictly, and the pump pipe and the pump head can be replaced at any time, make the advantages of the peristaltic pump in the chemical polishing process very obvious.

(1) Non-pollution: in the chemical polishing process, the polishing fluid conveyed by CR peristaltic pump is always flowing in the pump tube, not contacting the pump body, especially not contacting the mechanical transmission mechanism, avoiding metal pollution in the process of chemical mechanical polishing, but also not damaging the mechanical components of the pump body due to the corrosiveness of the polishing fluid.

(2) Self-priming ability: CR peristaltic pump can produce enough vacuum suction to suck polishing fluid from the night pool into the pump pipe during the working process, thus eliminating the pre-filling process of a pump and suction pipe. This also eliminates the need for submerged filling, so it is no longer necessary to place the pump below the liquid source level, making the installation position of the pump more flexible and better integrated with the polishing machine itself.

Besides, the water in the peristaltic pump will not be lost, so it can avoid unnecessary stopping.

(3) Simple operation: CR peristaltic pump operation is very simple, pump pipe installation, disassembly, locking can be carried out at any time according to requirements. Besides, the peristaltic pump is simple to control, and the speed control can be carried out by using the speed control knob or the operation panel. In addition, according to different flow requirements can also be a peristaltic pump at the same time 2 or 3 pump heads in series, to achieve a multi-channel supply of polishing fluid.